Design and Fabrication of Compact MEMS Electromagnetic Micro-Actuator with Planar Micro-Coil Based on PCB

Roer Eka Pawinanto, Jumril Yunas, Burhanuddin Majlis, Azrul Hamzah

Abstract


This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 µm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.

Keywords


MEMS, electromagnetic micro-actuator, printed circuit board (PCB), Silicon membrane, planar micro-coil

Full Text:

PDF


DOI: http://dx.doi.org/10.12928/telkomnika.v14i3.3998

Article Metrics

Abstract view : 382 times
PDF - 357 times

Refbacks

  • There are currently no refbacks.


Creative Commons License
This work is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.

TELKOMNIKA Telecommunication, Computing, Electronics and Control
ISSN: 1693-6930, e-ISSN: 2302-9293
Universitas Ahmad Dahlan, 4th Campus, 9th Floor, LPPI Room
Jl. Ringroad Selatan, Kragilan, Tamanan, Banguntapan, Bantul, Yogyakarta, Indonesia 55191
Phone: +62 (274) 563515, 511830, 379418, 371120 ext. 4902, Fax: +62 274 564604

View TELKOMNIKA Stats